The effect of thermal and microwave treatments on the properties of amorphous dLC-films formed by deposition in CH 4  plasma

A. R. Prokopev; E. P. Neustroev

Vestnik of North-Eastern Federal University
Vestnik Severo-Vostočnogo federalʹnogo universiteta imeni M.K. Ammosova

ISSN 2222-5404 (Print)
ISSN 2587-5620 (Online)

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Prokopev A.R., Neustroev E.P. The effect of thermal and microwave treatments on the properties of amorphous dLC-films formed by deposition in CH₄ plasma. Vestnik of North-Eastern Federal University. 2022;(2):41-46. (In Russ.) https://doi.org/10.25587/SVFU.2022.50.47.004

This work is licensed under a Creative Commons Attribution 4.0 License.

ISSN 2222-5404 (Print)
ISSN 2587-5620 (Online)

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About the Authors

A. R. Prokopev
M.K. Ammosov North-Eastern Federal University
Russian Federation

Prokopev Aisen Ruslanovich –head engineer, department of IT, senior lecturer of the Department of Radiophysics and Electronic Systems

Yakutsk

E. P. Neustroev
M.K. Ammosov North-Eastern Federal University
Russian Federation

Neustroev Efim Petrovich – Candidate of Physical and Mathematical Sciences, Associate Professor of the Department of Radiophysics and Electronic Systems of the Institute of Physics and Technology

Yakutsk

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